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介绍用Ｓｏｌ－Ｇｅｌ方法制备掺ＹＰＺＴ（ＰＹＺＴ）铁电薄膜的工艺，并比较了ＰＺＴ和ＰＹＺＴ薄膜的性能参数。实验结果表明，掺Ｙ后使ＰＺＴ铁电薄膜的性能得到改善
The process of preparing YPZT (PYZT) ferroelectric thin films by Sol-Gel method is introduced and the performance parameters of PZT and PYZT thin films are compared. The experimental results show that the performance of PZT ferroelectric thin films is improved after doped with Y