介绍了一套自行研制的用于光瞳滤波实验的投影光刻实验系统 ,其物镜光瞳处预留出放滤波器的位置 ,可方便取放滤波器。在理论分析的基础上 ,开展了光刻对比实验研究 ,实验研究结果表明 ,光瞳滤波能大幅度提高投影光刻成像系统分辨力 ,并增大焦深 ,是一种比较有效地提高投影光刻成像质量的方法 A set of self - developed projection lithography experimental system for pupil filter experiment is introduced. The filter pupil is reserved at the pupil of the objective lens, which is convenient to pick and place the filter. Based on the theoretical analysis, experimental research on lithography contrast is carried out. The experimental results show that the pupil filter can greatly improve the resolving power of projection lithography imaging system and increase the focal depth, which is a better way to increase the projection light Method of engraving imaging quality