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为使俄歇电子能谱有效地用于分析氧化物， 引入环境俄歇电子能谱方法对于消除入射电子束 对氧化物表面的损伤-包括荷电现象和氧元素电子受激脱附－６×１０－６Ｐａ Ｏ２环境比中和电子枪和低能 正离子束优越，也比 １．３×１０－２Ｐａ 氩气环境有效
For Auger electron spectroscopy to be effectively used for the analysis of oxides, the introduction of environmental Auger electron spectroscopy for the elimination of incident electron beam damage to the oxide surface - including the charging phenomenon and oxygen-excited electron desorption -6 × The 10-6Pa O2 environment is superior to the neutralization electron gun and the low-energy cation beam and is also more effective than the 1.3 × 10-2Pa argon environment