1引言微型电子机械系统（MEMS）作为20世纪末新型前沿学科，发展十分迅猛，并开创了微电子学、微结构学、微摩擦学、微流体力学、微细加工技术等新的研究领域。目前微电子机械系统已广泛应用于生物医学、航天、军事、工业和农业等方面，而生物医学是微机电系统应用中最具有诱惑 1 Introduction Micro-electro-mechanical systems (MEMS), as a new frontier discipline at the end of the 20th century, have developed rapidly and have opened up new research fields such as microelectronics, microstructurals, micro-tribology, microfluidics, and microfabrication technologies. At present, micro-electronic mechanical systems have been widely used in biomedical, aerospace, military, industrial and agricultural fields, and biomedicine is the most attractive in MEMS applications.