论文部分内容阅读
5生物微系统生物微系统在生物传感和芯片上实验室两方面的应用有长足发展,前者具有提供稳定的观察、小体积、生物相容性和低寄生阻抗的TSV等特点,后者已发展了三代微流控生物芯片(DMFB),近几年的技术创新有:基于TSV双面集成的用于大脑神经传感的微系统;采用硅基微流体元件直接嵌入注塑制件的聚合物芯片实验室;可使第二代DMFB的控制管脚数最小化的新的互连线规划方
5 Biological Microbial System The biological micro-system has made great progress both in biosensing and on-chip laboratory. The former has the characteristics of providing stable observation, small volume, biocompatibility and low parasitic impedance of TSV Three generations of microfluidic biochips (DMFBs) have been developed. In recent years, innovations have been made in micro systems based on TSV double-sided integration for neurosensory applications in the brain; polymers embedded directly in injection molded parts using silicon-based microfluidic elements Chip lab; a new interconnect planner that minimizes the number of control pins of the second-generation DMFB