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研究了宽禁带Ⅲ－Ｖ族化合物半导体氮化铝（ＡＩＮ）薄膜的折射率及其热光特性，采用棱镜──薄膜耦合装置和自动温控光波导测试仪，测出不同温度下氮化铝薄膜的波导特性，利用迭代法可得到ＡＩＮ的折射率与温度变化的关系，并首次测得了ＡＩＮ薄膜的热光特性。
The refractive index and thermo-optic properties of the wide-bandgap group III-V compound semiconductor aluminum nitride (AIN) thin films were investigated. The prism-thin film coupling device and the automatic temperature control optical waveguide tester were used to measure the nitride The waveguide characteristics of aluminum thin films were obtained by using the iterative method to obtain the relationship between the refractive index and temperature of AIN. The thermal properties of AIN thin films were measured for the first time.