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利用中频脉冲非平衡磁控溅射技术在不同的基体温度下制备了类金刚石(DLC)薄膜,采用Raman光谱、X射线光电子能谱(XPS)、纳米压痕测试仪、椭偏仪对所制备DLC薄膜的微观结构、机械性能、光学性能进行了分析。Raman光谱和XPS结果表明,当基体温度由50℃增加到100℃时,DLC薄膜中的sp3杂化键的含量随基体温度的升高而增加,当基体温度超过100℃时,DLC薄膜中的sp3杂化键的含量随基体温度的升高而减少。纳米压痕测试表明,DLC薄膜的纳米硬度随基体温度的增加先增加而后减小,基体温度为100℃时制备的薄膜的纳米硬度最大。椭偏仪测试表明,类金刚石薄膜的折射率同样随基体温度的增加先增加而后减小,基体温度为100℃时制备的薄膜的折射率最大。以上结果说明基体温度对DLC薄膜中的sp3杂化键的含量有很大的影响,DLC薄膜的纳米硬度、折射率随薄膜中的sp3杂化键的含量的变化而变化。
Diamond-like carbon (DLC) thin films were prepared by IF pulse unbalance magnetron sputtering at different substrate temperature. Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) DLC film microstructure, mechanical properties, optical properties were analyzed. Raman spectra and XPS results show that the sp3 hybridization bond content in DLC films increases with the increase of substrate temperature when the substrate temperature increases from 50 ℃ to 100 ℃. When the substrate temperature exceeds 100 ℃, sp3 hybrid bond content decreases with increasing substrate temperature. Nanoindentation test showed that the nano-hardness of DLC films first increased and then decreased with the increase of the substrate temperature, and the nano-hardness of the films prepared at the substrate temperature of 100 ℃ was the highest. The results of ellipsometry showed that the refractive index of diamond-like carbon films increased first and then decreased with the increase of substrate temperature, and the refractive index of films prepared at the substrate temperature of 100 ℃ was the highest. The above results show that the substrate temperature has a great influence on the content of sp3 hybridization in the DLC film. The nanohardness and refractive index of the DLC film vary with the sp3 hybridization content in the film.