阐述了氦质谱背压检漏的特点及目前存在的问题,在此基础上提出了改进建议。深入探讨了预充氦背压法测得的测量漏率与等效标准漏率的关系,指出预充氦背压法可用于检测压氦背压法检测不到的小漏孔,给出了等效标准漏率对测量漏率具有的双值均在分子流范围时的鉴别方法。 The characteristics of helium mass spectrometry backpressure leak detection and the existing problems are expounded, and some suggestions for improvement are put forward. The relationship between the measured leak rate and the equivalent standard leak rate measured by precharge helium backpressure method is discussed in depth. It is pointed out that the precharge helium backpressure method can be used to detect small leaks that can not be detected by the helium backpressure method. Equivalent standard leakage rate for the measurement of leakage rate has dual values ​​?? are in the molecular flow range of identification methods.