采用射频磁控溅射法,在石英衬底上制备了Zn1-xMgxO(x=0.00～0.16)薄膜。利用X射线衍射(XRD)、扫描电子显微镜(SEM)、紫外-可见分光光度计和光致发光(PL)光谱等分析了薄膜的结构、形貌和光学特性。结果表明:当x≤0.10时薄膜保持六角纤锌矿结构,而x=0.16时已出现MgO立方相;所有薄膜晶粒大小均匀,在100～150 nm之间;透光率在80%以上;薄膜带隙Eg与Mg含量呈线性关系;薄膜PL谱由较弱的紫外发光峰和较强的可见发光带组成,随Mg含量的增加紫外发光峰蓝移。 The films of Zn1-xMgxO (x = 0.00 ~ 0.16) were prepared on quartz substrate by RF magnetron sputtering. The structure, morphology and optical properties of the films were analyzed by X-ray diffraction (XRD), scanning electron microscopy (SEM), UV-visible spectrophotometer and photoluminescence (PL) The results show that the hexagonal wurtzite structure is preserved when x≤0.10, and the cubic phase of MgO has appeared at x = 0.16. The grain size of all the films is uniform between 100 and 150 nm and the transmittance is more than 80% The bandgap Eg has a linear relationship with the Mg content. The PL spectrum of the thin film consists of a weaker UV luminescence peak and a stronger visible luminescence band. The UV luminescence peak shifts blue with increasing Mg content.