针对表面增强拉曼散射的应用,采用严格耦合波分析方法研究了亚波长金属槽阵列的表面电磁场增强效应。模拟阵列周期和槽深对阵列槽口处电磁场增强的影响,明确了结构内部共振效应对电磁场增强的贡献,分析了亚波长金属槽阵列拉曼散射的平均增强效果及阵列外空间中电磁场增强的有效作用范围。研究表明,在槽内共振效应的影响下,亚波长金属槽阵列在一个周期内的拉曼散射增强因子可达106数量级,并在垂直距离阵列表面1/5波长的范围内可得到明显的电磁场增强,超出该范围增强因子将迅速衰减到1的数量级。数值结果表明阵列表面电磁场增强几乎不受贵金属类型的影响。 For the application of surface-enhanced Raman scattering, a rigorous coupled-wave analysis method was used to study the surface electromagnetic field enhancement effect of subwavelength metal array. The influence of the periodicity and groove depth of the array on the electromagnetic field enhancement at the notch of the array was clarified. The contribution of the internal resonance effect of the structure to the enhancement of the electromagnetic field was clarified. The average enhancement effect of the Raman scattering of the subwavelength metal trench array and the enhancement of the electromagnetic field in the space outside the array Effective range. The results show that under the influence of the in-tank resonance effect, Raman scattering enhancement factor of subwavelength metal groove array can reach 106 orders of magnitude in one cycle, and obvious electromagnetic field can be obtained in the vertical distance of 1/5 wavelength of the array surface Enhancement, beyond which the enhancement factor will rapidly decay to an order of magnitude. The numerical results show that the enhancement of the electromagnetic field on the array surface is hardly affected by the type of noble metal.