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本文介绍了用电镀的方法提高激光感应聚酰亚胺薄膜电导率的实验结果。实验证实,激光感应聚酰亚胺薄膜表面产生的物理和化学变化对金属镀膜的形成和镀层与衬底的结合性有积极的影响。文中讨论了在整个过程中一些电镀条件,如电流密度等对金属膜层的均匀性、晶粒的大小等性质所起的作用。实验证明电流密度越小,镀层越均匀,晶粒也越小。该实验将激光技术与电镀这一传统工艺相结合,从而提高了有机复合薄膜的电导率。这一结果有可能在微电子工业领域得到实际应用。
This article describes the experimental results of using electroplating methods to improve the conductivity of laser-induced polyimide film. Experiments confirmed that the physical and chemical changes produced by the laser-induced polyimide film surface have a positive effect on the formation of the metal coating and the adhesion between the coating and the substrate. In this paper, we discuss the effect of some plating conditions such as current density on the uniformity of the metal film and the size of the grains during the whole process. Experiments show that the smaller the current density, the more uniform coating, the smaller the grain. The experiment combines laser technology with electroplating, a traditional process that increases the conductivity of organic composite films. This result is likely to be in the field of microelectronics industry practical application.