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利用ANSYS有限元分析软件数值模拟了多脉冲激光作用下水冷铜基Ni/Au反射镜的热畸变特性。得出了在不同能量的多脉冲激光照射下的温升、热应力及热变形分布,并在此基础上分析了温升和热变形随横向距离的变化规律以及应力与沟槽布局的关系。计算结果表明:循环的冷却水有效地降低了镜体温度,减少了镜面的热畸变;沟槽的布局对应力有一定的影响,沿沟槽方向存在较大的Von Mises应力。
The thermal distortion characteristics of water-cooled copper-based Ni / Au mirrors under multi-pulse laser were numerically simulated by ANSYS finite element analysis software. The temperature rise, thermal stress and thermal deformation distribution under multi-pulsed laser irradiation with different energies were obtained. Based on the analysis, the variation of temperature rise and thermal deformation with lateral distance and the relationship between stress and groove layout were analyzed. The calculation results show that the circulating cooling water effectively reduces the temperature of the mirror body and reduces the thermal distortion of the mirror surface. The layout of the groove has some influence on the stress and a large Von Mises stress along the groove direction.