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为解决CO2激光器高反膜耦合窗在腔内高功率激光作用下产生的热效应问题,对耦合窗的温度场和热形变场进行了理论分析研究。通过谐振腔工作状态分析,首次提出了腔内振荡激光具有混合模式分布的表达式,并利用半解析热分析方法得出了在混合模式下耦合窗产生的温度场和热形变场的一般表达式,同时与将腔内激光分布作均匀分布、高斯分布假设下耦合窗的情况作了对比分析。研究结果,当腔内谐振功率为3800W、腔内激光混合模式分布时,耦合窗内表面中心最大热形变量约为0.91μm,作均匀分布、高斯分布假设分别造成最大热形变量偏小20.88%,偏大78.02%。
In order to solve the thermal effect caused by the high-power laser in a high-CO 2 coupling window of a CO2 laser, the temperature field and the thermal deformation field of the coupled window are theoretically analyzed. Through analyzing the working state of resonator, the expression of mixed mode distribution of intracavity laser is proposed for the first time, and the general expression of temperature field and thermal deformation field of coupled window in mixed mode is obtained by semi-analytical thermal analysis , At the same time with the cavity laser distribution for the uniform distribution of Gaussian distribution under the assumption of the coupling window case made a comparative analysis. The results show that when the cavity resonance power is 3800W and the cavity laser mixing mode is distributed, the maximum thermal deformation of the center of the coupling window is about 0.91μm, and the distribution of the maximum thermal deformation is 20.88% , 78.02% bigger.