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设想一下，如果能够一步实现低介电常数绝缘材料的双大马士革结构（包括通孔和金属导线槽），就能减少123步的工艺步骤。这就是纳米压印技术所能够带来的惊人之处。此外，这项技术成本低廉、潜力无限。
纳米压印技术：32纳米光刻之选？
【摘 要】
：
设想一下，如果能够一步实现低介电常数绝缘材料的双大马士革结构（包括通孔和金属导线槽），就能减少123步的工艺步骤。这就是纳米压印技术所能够带来的惊人之处。此外，这项技术成本
【机 构】
：
SemiconductorInternational主编
【出 处】
：
集成电路应用
【发表日期】
：
2006年10期
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