国内引进了不少离子注入机,维修问题日渐重要。对其损坏部件,用国产配件进行替换,不乏为又快又省的维修方法。本文叙述了八年多来,我们在维修IM—200M型离子注入机的实践中,对损坏的吸极电源、氟里昂热交换器和化学机械泵等重要部件,用自制的或改制的国内配件进行替换,从而保证了设备安全运行二万五千多小时,注入八万五千多块硅及GaAs靶片,完成了集成电路研制和开发任务。 Domestic introduction of a lot of ion implanters, maintenance issues are increasingly important. Damage to its parts, with domestic parts to replace, there is no lack of fast and save the maintenance methods. This article describes the past eight years, we in the maintenance of IM-200M ion implanter practice, the damaged suction power, Freon heat exchanger and chemical mechanical pumps and other important components, with homemade or modified domestic accessories , Thus ensuring the safe operation of equipment over 25,000 hours, injecting more than 85,000 pieces of silicon and GaAs target sheets, and completing the research and development of integrated circuits.