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采用三相埋沟结构,设计并研制成功用于高背景下红外探测器的高灵敏度4×128元TDICCD信号处理器件。器件转移效率99.99%,动态范围60dB,时钟频率10MHz。文章详细阐述该器件的工作原理、结构设计和制作工艺。
Using three-phase buried structure, a highly sensitive 4 × 128 TDICCD signal processing device has been designed and developed successfully for infrared detector in high background. Device transfer efficiency of 99.99%, the dynamic range of 60dB, the clock frequency of 10MHz. The article details the working principle of the device, structure design and manufacturing process.