稀土过渡族金属合金采用溅射方法容易制得非晶态材料,经晶化处理后得到的矫顽力要比一般制造的晶体永磁材料为高,例如等离子喷镀的非晶SmCo_5磁体经晶化处理后内禀矫顽力_iH_c由小于3000 Oe变成67500 Oe,远比一般烧结SmCo_5磁体_iH_c=10000—30000Oe的高。至于稀土过渡族金属薄膜在晶化过程中结构的变化,由于薄膜质量很小,且易氧化,因此文献中很少报道。本文研究了SmCo_5非晶薄膜晶化过程中 The rare earth transition metal alloy is easily prepared by sputtering method, and the coercive force after the crystallization treatment is higher than that of the commonly-used crystalline permanent magnetic materials, for example, the plasma-sprayed amorphous SmCo_5 magnet is crystallized After treatment, the intrinsic coercivity _iH_c is changed from less than 3000 Oe to 67500 Oe, which is much higher than that of the SmCo_5 magnet sintered at _iH_c = 10000-30000 Oe. As for the rare earth transition metal film in the crystallization process changes in the structure, due to the small film quality, and easy oxidation, so rarely reported in the literature. In this paper, SmCo_5 amorphous thin film crystallization process