轻元素深度剖面分析有着许多实际的应用,如:聚变堆第一壁的辐射损伤;结构材料的氢脆;氧化、贮氢材料、超导材料、太阳能材料中氢的分布等。本文介绍用于轻元素深度剖面分析的核反应法、质子弹性散射法、前散射符合法和弹性反冲探测法,并简单介绍这些方法的应用。 Light element depth profile analysis has many practical applications, such as: radiation damage to the first wall of the fusion reactor; hydrogen embrittlement of structural materials; oxidation, hydrogen storage materials, superconducting materials, hydrogen distribution in solar materials and the like. In this paper, the nuclear reaction method, the proton-elastic scattering method, the pre-scattering method and the elastic recoil detection method for the light element depth profile analysis are introduced, and the application of these methods is briefly introduced.