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采用直流－射频等离子化学气相沉积方法制备出类金刚石薄膜，用Ｆｏｕｒｉｅｒ透射谱和吸收谱对类金刚石膜的结构进行了研究．类金刚石膜中大部分碳原子以ｓｐ３组态存在．结合在膜中的氢原子与碳原子之间可形成ｓｐ３Ｃ—ＣＨ２，ｓｐ３Ｃ—ＣＨ３和ｓｐ２Ｃ—ＣＨ２基，其含量以ｓｐ３Ｃ—ＣＨ２基为主．增加Ａｒ气分压与提高极板负偏压对类金刚石膜结构产生的影响是相似的，增大极板负偏压或Ａｒ气的含量将减小类金刚石膜中ｓｐ３／ｓｐ２比值和Ｈ的含量以及ＣＨ２基的含量，同时增加薄膜的交联，减少聚合相的含量．
Diamond-like carbon films were prepared by direct current-radio frequency plasma-enhanced chemical vapor deposition. The structure of diamond-like carbon films was studied by Fourier transmission and absorption spectra. Diamond-like carbon film most of the carbon atoms sp3 configuration exists. The sp3C-CH2, sp3C-CH3 and sp2C-CH2 groups are formed between the hydrogen atoms and the carbon atoms in the film, and the contents thereof are mainly sp3C-CH2 groups. The effects of increasing partial pressure of Ar gas and increasing the negative bias of plate on the diamond-like carbon film structure are similar. Increasing the negative bias or the content of Ar gas will decrease the sp3 / sp2 ratio and H in DLC film Content and CH2 group content, while increasing the crosslinking of the film to reduce the polymerization phase content.