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利用离子束混合 离子注入 (Ar+ )和磁控溅射相结合的实验技术在HR 1不锈钢基体上制备了注入N+ 的SiC涂层 ,并用表面分析手段对所制备涂层的表面形貌、剖面形貌、相结构、表面成分、表面元素的化学态进行了分析。结果表明 :制备的涂层结构致密、表面平整、膜层成分均匀 ;涂层与基体之间形成了一明显的过渡层 ,增强了涂层和基体之间的结合力。用二次离子质谱 (SIMS)对充氘涂层的阻氢性能进行了定性分析。结果表明 :涂层元素与氢形成稳定的化学键 ,抑制了氢的扩散和迁移 ,使得涂层具有一定的阻氢能力
The N + -doped SiC coating was prepared on HR 1 stainless steel substrate by the combination of ion-beam mixed ion implantation (Ar +) and magnetron sputtering. The surface morphology, cross-section Morphology, phase structure, surface composition, the chemical elements of the surface elements were analyzed. The results show that the prepared coating has a compact structure, a smooth surface and a uniform film composition. An obvious transition layer is formed between the coating and the substrate, which enhances the bonding between the coating and the substrate. The hydrogen barrier properties of deuterium-depleted coatings were qualitatively analyzed by SIMS. The results show that the coating elements and hydrogen form a stable chemical bond, which inhibits the diffusion and migration of hydrogen and makes the coating have a certain hydrogen-blocking ability