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提出了一种基于横向塞曼激光器的新的滚转角测量系统。该系统在已有技术的基础上 ,将测量放大倍率又扩展了 4倍 ,从而大大提高了滚转角的测量精度。系统以横向塞曼激光器出射的正交线偏振光作为测量光 ,首先经 1 /4波片将线偏振光变成微椭圆偏振光 (即进行微椭偏化 ) ,然后测量光通过作为传感器的 1 / 2波片 ,由直角反射镜将光路折回 ,使测量光再次通过作为传感器的 1 / 2波片。由于直角反射镜提供了合理的坐标变换 ,所以使得测量光在两次通过1 / 2波片时 ,偏振方向的改变被叠加了 ,相当于被测量的滚转角放大了 4倍。最后测量光经检偏器合成 ,再用光电探测器接收。由测量光的相位变化可以求出工作台的滚转角变化。在整周期内 ,测量光的相位变化与滚转角成非线性关系 ,但在特定的角度上会出现线性很好的滚转角测量灵敏度倍增区。采用这种方法 ,测量放大倍率可以达到 2 0 0倍 ,能够实现高精度的滚转角测量。使用分辨率为 0 0 0 3°的相位计 ,滚转角的测量分辨率可达到 0 1″。
A new roll angle measurement system based on transverse Zeeman laser is proposed. The system based on the existing technology, the measurement magnification and expanded by 4 times, thus greatly improving the roll angle measurement accuracy. The system uses orthogonal linearly polarized light exiting the transverse Zeeman laser as the measuring light, first the linearly polarized light is turned into micro-elliptically polarized light (that is, micro-elliptically polarized) by a quarter-wave plate, and then the measured light is passed through as a sensor 1/2 wave plate, the light path is folded back by a right-angle mirror, so that the measurement light again passes through the 1/2 wave plate as a sensor. Because right-angle mirrors provide a reasonable coordinate transformation, the change in polarization direction is superimposed on the measured light passing through the ½ wave plate twice, corresponding to a magnification of four times the measured roll angle. The final measurement light by the analyzer synthesis, and then photodetector to receive. The change of the roll angle of the worktable can be obtained from the change of the phase of the measuring light. During the whole period, the phase of the measuring light changes nonlinearly with the roll angle, but at a specific angle there will be a very linear gain doubling zone for the roll angle measurement. With this method, the measurement magnification can be up to 200 times, to achieve high-precision roll angle measurement. Using a phase meter with a resolution of 0 0 0 3 °, the measurement resolution of the roll angle can reach 0 1 ".