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综述了作者近年来通过交流螺旋磁控溅射制备锐钛矿和金红石型微晶薄膜的研究进 展,阐述了薄膜的制备工艺与其晶体结构、组成、光学性能以及杀菌能力的关系,并通过有效的 方法对其光学性能进行了改进。
The progress of the preparation of anatase and rutile microcrystalline thin films by exchange spiral magnetron sputtering in recent years is reviewed. The relationship between the preparation process of thin films and their crystal structure, composition, optical properties and bactericidal ability is discussed. Method to improve its optical properties.