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采用双层辉光离子渗金属技术在20 钢上进行镍铬共渗处理,对合金元素的溅射和吸收这两个渗金属过程,从放电及溅射等理论角度并结合试验结果进行了分析讨论。结果表明,放电条件对渗层形成效率有很大影响,合金元素的利用率在不同的放电参数下会有悬殊的变化。溅射量决定于溅射电压与气压,利用率则受工件偏压、气压、极间距的共同控制。在一定的溅射量下,利用率的高低决定了渗层质量及形成效率。提高合金元素的利用率是工艺参数选择的最重要目标。
Nickel-chromium co-infiltration was carried out on 20 steel by double-glow plasma infiltration metal technology. The sputtering and absorption of alloying elements were studied from the theoretical point of discharge and sputtering combined with the experimental results discuss. The results show that the discharge conditions have a great influence on the formation efficiency of the infiltrated layer, and the utilization rate of alloying elements varies greatly under different discharge parameters. Sputtering depends on the sputtering voltage and pressure, the utilization rate by the workpiece bias, pressure, pole spacing under the common control. In a certain amount of sputtering, the level of utilization determines the quality of the diffusion layer and the formation of efficiency. Increasing the utilization of alloying elements is the most important goal of process parameter selection.