在激光器阵列的相干合成技术中,并联主振荡功率放大器(MOPA)方案最关键的技术是对相干合成中的光路进行相位探测与控制。采用外差法,通过实时探测和校正光路中相位的变化,能够确保输出光束相位一致。相位调制器采用液晶相位调制器,主振荡激光器的波长为532 nm,输出功率0～6 W连续可调。外差法系统的移频量为40 MHz,相位控制精度优于λ/7。在闭环控制过程中,液晶相位控制器较好地实现了信号光路的相位控制。 In the coherent synthesis of laser arrays, the most critical technique in the parallel main oscillator power amplifier (MOPA) scheme is the phase detection and control of the optical path in coherent synthesis. The use of heterodyne method, through the real-time detection and correction of the phase change in the optical path, to ensure that the output beam phase. The phase modulator uses a liquid crystal phase modulator. The wavelength of the main oscillation laser is 532 nm and the output power is 0 ~ 6 W continuously adjustable. The heterodyne system has a frequency shift of 40 MHz and the phase control accuracy is better than λ / 7. In the closed-loop control process, the liquid crystal phase controller to achieve a better signal phase control of the optical path.