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为了实现激光在放大器多程放大及靶面高指向精度,介绍了高效准分子激光系统多路光束自动准直技术的研究工作。提出利用双叉丝阵列像传递光路,分别在输入光路和输出光路上设置叉丝阵列作为近远场基准,解决了光路中无天然准直基准及多路并行准直等问题。搭建了预放大器II的三路双程激光自动准直系统,验证了该方法的可行性,并利用成像系统和反馈控制结构实现了自动准直系统的联调实验。
In order to realize multi-pass amplification of the laser in the amplifier and high precision of the target surface, the research work on automatic alignment technology of multi-channel beams in high-efficiency excimer laser system is introduced. Proposed the use of double cross-hatched array image transfer optical path, respectively, in the input optical path and the output optical path to set the fork array as the near and far field reference to solve the optical path without the natural alignment criteria and multiple parallel collimation and other issues. The preamplifier II three-way two-pass automatic laser collimation system is constructed, which verifies the feasibility of the method. The imaging system and the feedback control structure are used to realize the joint alignment experiment of the automatic collimation system.