利用x射线广角衍射和低角掠入射散射谱、正电子湮没谱、定性分析软件和Positronfit程序 ,研究了生长在Si( 10 0 )基底上的金刚石膜微结构 .研究发现 ,在样品邻近基底区域为纳米多晶结构 ,具有弱的 [111]织构 ;在邻近表面区域为微米多晶结构 ,具有强的 [2 2 0 ]织构 .金刚石膜样品有空位、空位团和空洞 3种缺陷 ,其中主要缺陷是大约 10个空位形成的空位团 The microstructure of diamond films grown on Si (100) substrates was investigated by X-ray wide-angle diffraction, low-angle grazing incidence scattering spectroscopy, positron annihilation spectroscopy, qualitative analysis software and Positronfit program. Is a nano-polycrystalline structure with a weak texture of [111], a dense polycrystalline structure in the vicinity of the surface area, and a strong [220] texture.The diamond film samples have three defects, namely vacancy, vacancy clusters and voids, One of the major drawbacks is the empty cluster formed by about 10 vacancies