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中科院光电技术研究所为满足我国机电一体化和传统机床改造的需要,先后开发了SX-5和SX-6两个系列长光栅线位移数字测量系统。该系统由长光栅线位移传感器和光栅数显表组成。主要技术数据:光栅:25线/mm和50线/mm,精度:±2μm/m;标尺光栅同指示光栅间采用滚动摩擦,回程差:<2μm;工作速度:60m/min;输出讯号双路正弦波或方波任选。数显表的最小分辨率:0.5μm,具有细分预置,D/R和mm/in转换,线性误差修正功
Institute of Photoelectric Technology, Chinese Academy of Sciences in order to meet the needs of China’s mechanical and electrical integration and transformation of traditional machine tools, has developed the SX-5 and SX-6 series of two long grating displacement digital measurement system. The system consists of a long raster line displacement sensor and grating digital form. Main technical data: Grating: 25 lines / mm and 50 lines / mm, accuracy: ± 2μm / m; Rolling friction between scale grating and indicating grating, return difference: <2μm; Working speed: 60m / min; Sine or square wave optional. Digital display minimum resolution: 0.5μm, with subdivision presets, D / R and mm / in conversion, linear error correction work