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以正硅酸乙酯(TEOS)为前驱体,N_2为载气,在C/C复合材料表面通过低压化学气相沉积(LPCVD)得到非晶SiO_2涂层。研究了沉积温度对涂层成分、涂层形貌和沉积速率的影响。通过XRD、XPS、FTIR、SEM和EDS等测试手段,对涂层的成分、微观形貌以及模拟体液浸泡后材料的生物活性进行了表征和分析。实验结果表明:涂层的主要物相为非晶SiO_2;模拟体液浸泡至35天,样品表面生成类骨羟基磷灰石,与未涂层的C/C复合材料相比,表明非晶SiO_2涂层具有良好的生物活性。随着沉积温度的增加,沉积速率增大,涂层包覆更加完整;SiO_2颗粒由不规则形状转变为规则的球形,最后转变成多边形。
An amorphous SiO 2 coating was obtained by low pressure chemical vapor deposition (LPCVD) on the surface of C / C composite with tetraethyl orthosilicate (TEOS) as precursor and N 2 as carrier gas. The effect of deposition temperature on coating composition, coating morphology and deposition rate was studied. The composition, microstructure and biological activity of the soaked material were characterized and analyzed by XRD, XPS, FTIR, SEM and EDS. The experimental results show that the main phase of the coating is amorphous SiO_2. When the simulated body fluid is soaked for 35 days, the bone-like hydroxyapatite is formed on the sample surface. Compared with the uncoated C / C composites, Layer has good biological activity. As the deposition temperature increases, the deposition rate increases and the coating layer becomes more complete. The SiO_2 particles transform from the irregular shape to the regular spherical shape and finally to the polygonal shape.