By use of optical spectrum technology, the spectra of X-ray induced by highly charged 40Arq+ ions interacting with Au surface have been studied. The results show that the argon Kα X-ray were emitted from the hollow atoms formed below the surface. There is a process of multi-electron exciting in neutralization of the Ar16+ion, with electronic con-figuration 1s2 in its ground state below the solid surface. The yield of the projectile Kα X-ray is related to its initial electronic configuration, and the yield of the target X-ray is related to the projectile kinetic energy. By use of optical spectrum technology, the spectra of X-ray induced by highly charged 40Arq ionized interacting with Au surface have been studied. There results show that the argon Kα X-ray were emitted from the hollow atoms formed below the surface. a process of multi-electron exciting in neutralization of the Ar16 + ion, with electronic con-figuration 1s2 in its ground state below the solid surface. The yield of the projectile Kα X-ray is related to its initial electronic configuration, and the yield of the target X-ray is related to the projectile kinetic energy.