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为了对微纳加工工件进行三维形貌测量,建立了基于小孔阵列的并行激光共聚焦显微检测系统。利用自行研发的三波长皮秒脉冲激光加工机在面积为1cm2的铜箔上制备100×100的小孔阵列,以实现并行分光,小孔的平均直径为43.6μm,间距为100μm。利用小孔阵列系统,分别对镀膜平板和螺钉进行了三维测量。实验结果表明,在轴向平移台步距为1μm的条件下,本文系统能对待测样品实现轴向分辨率为1μm、横向分辨率为20μm的三维扫描并重构出样品形貌。本文共焦显微检测方法能大大提高共焦扫描速度,能很好满足一般工业检测需求,本文为并行共焦探测技术提供了一条新的研究和运用方法。
In order to measure the three-dimensional topography of the micro-nano machined workpiece, a parallel laser confocal microscopic detection system based on a pinhole array was established. A 100 × 100 array of small holes was prepared on copper foil with an area of 1cm2 using a three-wavelength picosecond pulse laser processing machine developed by itself to achieve parallel spectroscopy. The average diameter of the holes was 43.6μm and the pitch was 100μm. Using aperture array system, three-dimensional measurement of coating plate and screw respectively. The experimental results show that the system can reconstruct the three-dimensional scanning of the sample under axial resolution of 1μm and horizontal resolution of 20μm under the condition of 1μm axial translation step. The confocal microscopy method can greatly improve the confocal scanning speed and can meet the needs of general industrial detection. This paper provides a new method for the research and application of parallel confocal detection.