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拼接光栅技术是提高高功率激光器输出能量的一条可能途径,为保障高功率激光器光束时空光束质量,拼接光栅角度误差必须小于0.4μrad,位移偏差小于20 nm。为了满足光栅拼接调整系统的高精度高稳定性要求,设计了光栅拼接旋转角度偏差检测方案用于测量两块相邻光栅之间的相对空间姿态。测量系统测量光束与压缩器主光束同轴,利用相移式干涉仪测量待测光,得到若干干涉图样,通过快速傅里叶变换还原波前得到相邻两块光栅相对空间角度偏差。通过实验验证了检测系统的理论可行性,目前在小口径光束下精度达到0.45μrad。测量方案结合拼接光栅只需要测量波面倾斜误差的要求,简化了干涉测量光路及图像分析流程,有利于光栅拼接技术的工程化应用。
Splicing grating technology is a possible way to improve the output power of high-power laser. To ensure the quality of spatiotemporal beam in high-power laser beam, splicing grating angle error must be less than 0.4μrad and displacement deviation less than 20 nm. In order to meet the requirement of high-precision and high-stability of the raster splicing adjustment system, a grating splicing rotation angle deviation detection scheme was designed to measure the relative space attitude between two adjacent rasters. The measured beam of the measurement system is coaxial with the main beam of the compressor. The phase difference interferometer is used to measure the light to be measured to obtain several interference patterns. The relative spatial angle deviation of two adjacent gratings is obtained by means of fast Fourier transform. The theoretical feasibility of the detection system is verified by experiments. At present, the accuracy of the detection system reaches 0.45μrad under the small aperture beam. The measurement scheme combined with the splicing grating only needs to measure the requirement of the wavefront tilt error, simplifies the optical path of the interferometry and the image analysis flow, which is good for the engineering application of the grating splicing technique.