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出现于20世纪80年代后期的微机械技术可以制作出微米尺度的传感器和执行器。这些微器件与信号调节和处理电路集成后,组成了可执行分布式实时控制的微电子机械系统(MEMS)。这种性能为流动控制研究开辟了一个崭新的研究领域。利用MEMS技术设计和制作了一种传感器和一种执行器。实验证明,采用体硅腐蚀的工艺制作微流体器件是可行的,同时可以避免牺牲层腐蚀和释放的复杂工艺。
Micromechanical technologies that emerged in the late 1980s produced microscale sensors and actuators. These micro-devices integrate with the signal conditioning and processing circuitry to form a microelectromechanical system (MEMS) that performs distributed, real-time control. This performance opens up a whole new field of research for flow control research. The use of MEMS technology to design and produce a sensor and an actuator. Experiments show that it is feasible to fabricate microfluidic devices by using the bulk silicon etching process, meanwhile avoiding the complicated process of sacrificial layer etching and releasing.