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一、引言 随着电真空工业以及其他各个科学技术部门的发展,人们对于高真空技术的要求越来越高了。为了要把庞大容器的压强降到非常低(p<10~(-8)mmHg),就要求抽气机具有很高的吸气速率和很低的极限压强。钛抽气机在满足上述要求上此起其他类型抽气机更显得优越。例如利用钛抽气机可以获得10~(-10)mmHg—10~(-11)mmHg的低压。而且也可以具
I. INTRODUCTION With the development of electric vacuum industry and other various science and technology departments, the requirements for high vacuum technology are getting higher and higher. In order to reduce the pressure of a large container to very low (p <10 -8 mmHg), the aspirator is required to have a high inspiratory rate and a very low ultimate pressure. Titanium suction machine to meet the above requirements on the other types of suction machine even more superior. For example, using a titanium aspirator can obtain 10 ~ (-10) mmHg-10 ~ (-11) mmHg low pressure. But also can be