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The SrS:HoF3 Electroluminescent (EL) thin films are prepared at the different substrate temperature by electron beam evaporation. The crystallinity and EL characteristics of the samples are analyzed. It is found that the main diffraction peak is (200) at the higher substrate temperature and the main diffraction peak is (111) at the lower substrate temperature. The blue emission intensity and EL brightness of the SrS∶HoF3 thin films increase with the increase of the substrate temperature. Annealing the samples can change the cyrstal phase and strengthen the blue emission of EL thin film.