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介绍了一种测量固体薄膜厚度的光学方法。该方法具有测量速度快、可实现在线测量等特点。为解决薄膜生产过程中厚度在线检测问题,构造了一套软硬件实验系统,利用该系统进行实验的结果表明:在10~100μm厚度范围,测量误差小于10%,满足实际生产需要。
An optical method for measuring the thickness of a solid film is presented. The method has the advantages of fast measurement speed and online measurement. In order to solve the problem of on-line thickness detection during film production, a hardware and software experimental system was constructed. The experimental results show that the measurement error is less than 10% in the thickness range of 10 ~ 100μm, which meets the actual production needs.