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采用IAD、IBS、MS等三种方法在CAB玻璃上制备了SiO2膜层,通过纳米压痕和划痕仪测量了膜层的纳米硬度和摩擦系数;利用傅里叶转换红外光谱仪对薄膜光谱性能进行了测量;利用SEM,观测膜层表面和断面形貌。结果表明:不同方法制备的SiO2膜层,聚集密度、硬度和摩擦系数不相同,其中,IBS法制备膜层硬度最高,MS法所制备膜层,硬度略低,而IAD法制备的膜层硬度最低;摩擦系数上,IBS法和IAD法相当,较MS法制备的膜层摩擦系数要高。从成膜基理上,对上述结论给出了理论分析。根据试验结果,选用MS法作为CAB玻璃保护膜的制备方法。
SiO 2 film was prepared on CAB glass by IAD, IBS and MS methods. The nano-hardness and friction coefficient of the film were measured by nano-indentation and scratch tester. The Fourier transform infrared spectroscopy The measurements were made. The surface and cross section of the film were observed by SEM. The results show that the SiO2 films prepared by different methods have different aggregation density, hardness and friction coefficient. Among them, IBS has the highest film hardness and the MS film has a slightly lower hardness. However, the film hardness The lowest; the friction coefficient, IBS method and IAD method, compared with the MS method to prepare the membrane friction coefficient is higher. From the film formation theory, the above conclusions are given theoretical analysis. According to the test results, the MS method is selected as the preparation method of CAB glass protective film.