报道了利用出射面加工有微棱锥结构抗反射层的GaP晶体THz发射器产生超快THz脉冲.基于微结构界面等效折射率渐变原理,设计并利用超精密微加工技术在GaP块状THz发射器出射面加工了亚波长微棱锥结构层,用以提高所产生的THz波的耦合输出.实验验证了该微结构层能提高所产生的THz波的耦合输出效率,并能够有效散射剩余抽运光,提高系统运转的稳定性. It is reported that an ultra-fast THz pulse is generated by a GaP crystal THz emitter with a micro-pyramid-shaped anti-reflective layer on the exit surface.Based on the gradual change of the equivalent refractive index at the microstructure interface, an ultra-precision micro- In order to improve the coupling output of the generated THz wave, the micro-pyramid structure layer is processed on the exit surface of the device, and the experimental results show that the microstructure layer can improve the coupling output efficiency of the generated THz wave and effectively scatter the residual pumping Light, improve the stability of system operation.