杭尼威耳公司技术中心的一个研究小组,将光发射器和检波器制作在蚀刻的沟道中,从而验证了将光学元件和集成电路制备到同一块半导体衬底上的可能性,他们制出的完整集成块,其性能和可靠性比分立的或混合的光电子器件和微电子器件好。这种方法有独特的优点,因为光发射器的结构和工艺过程与邻近电子线路的工艺过程无关,两种器件都可达到最佳性能。为了把发光二极管或激光器与电子线路集成在一起,以前亦作过许多努力,通常都是在同一个外延层内制作光电子和微电子器件。或者将其中一种元 A team at the technology center at Hangzhou Nwe Weifang made photo-emitters and detectors in etched trenches to verify the possibility of making optical components and integrated circuits on the same piece of semiconductor substrate, The integrity of the block, its performance and reliability than discrete or mixed optoelectronic devices and microelectronic devices. This method has the unique advantage that both devices achieve the best performance because the structure and process of the light emitter are independent of the process of the adjacent electronic circuitry. In order to integrate light emitting diodes or lasers with electronic circuits, many efforts have been made before, usually in the same epitaxial layer making optoelectronic and microelectronic devices. Or one of them