原子力显微镜是一种非常有用的精密量测仪器,此仪器具有奈米等级的解析能力并适用于导体与非导体样本且不受使用环境所限制,为目前不可或缺的微奈米量测工具。然而,传统原子力显微镜所使用的扫描方式,在轨迹上容易造成扫描仪的机械共振问题,且无法去除不必要的扫描区域,因此,对于一个大范围与高分辨率的影像要求,必须要以一个更长的扫描时间来达成,无法给予一个有效率的扫描表现,为目前原子力显 Atomic force microscope is a very useful precision measuring instruments, the instrument with nano-level resolution capabilities and is suitable for conductor and non-conductor samples and is not subject to the use of the environment, as the current essential nano-measurement tools . However, the scanning method used by the traditional atomic force microscope is likely to cause the mechanical resonance problem of the scanner on the track, and the unnecessary scanning area can not be removed. Therefore, for a large-area and high-resolution image requirement, one Longer scan time to reach, can not give an efficient scan performance, for the current Atomic Force was significantly