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为了提高超精密机电系统的运动精度,隔离环境振动对其运动性能的影响,超精密机电系统广泛应用了高性能的超精密隔振系统。隔振系统通常由若干个性能一致的隔振器组成,如果各个隔振器的性能不能完全一致,则会导致负载的多自由度运动耦合,影响隔振系统的隔振性能。针对该问题,以隔振器等边三角形排布的隔振系统为例,研究隔振系统刚度分布对其隔振性能的影响,通过建立隔振系统动力学模型,得到各种刚度分布情况下特定点的频响曲线,分析曲线随刚度分布变化的规律,提出一种基于激励-响应的隔振系统刚度分布的测试方法。
In order to improve the precision of the ultra-precision electromechanical system and isolate the influence of environmental vibration on its kinematic performance, the super-precision electromechanical system widely applies the high-performance ultra-precision vibration isolation system. The vibration isolation system usually consists of several vibration isolators with the same performance. If the performance of each vibration isolator can not be exactly the same, the multi-degree of freedom of the load will be caused to move-coupled and the vibration isolation performance of the vibration isolation system will be affected. In this paper, the vibration isolation system with equilateral triangle of isolator is taken as an example to study the influence of the stiffness distribution of vibration isolation system on its vibration isolation performance. By establishing the dynamic model of vibration isolation system, various stiffness distributions are obtained Frequency response curve of specific point, and analyze the law of the curve changing with the stiffness distribution, a test method of stiffness distribution based on excitation-response vibration isolation system is proposed.