决定精密机械及精密仪器运动精度的重要因素之一是导轨,目前多采用气体静压式,材料多为不锈钢、铝合金、经防锈处理过的铁质材料及石料等。但是,在要求精度为微米以下的超精密加工领域,构件自重产生的变形、温度及湿度变化产生的微小变形都会对加工精度造成严重影响。这是上述材料所难以满足的。 One of the most important factors in determining the precision of precision machinery and precision instruments is the guide rail. At present, most of the materials are made of stainless steel and aluminum, and the iron materials and stones treated by rust prevention are mostly used. However, in the field of ultra-precision machining requiring micrometers of micrometer accuracy, the deformation of the self-weight of the component, the slight deformation caused by the temperature and the humidity, all have a serious impact on the machining accuracy. This is difficult to meet the above materials.