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为了提高衍射远场显微成像的分辨率,采用一种振幅透过率随半径呈幂函数分布的光瞳滤波器进行了理论分析和数值模拟。通过在光路中加入幂函数分布的振幅型光瞳滤波器,利用标量衍射理论推导出夫琅禾费衍射分布的计算公式;通过MATLAB软件给出衍射图样,对比衍射分布的主瓣宽度。结果表明,当幂次数为3时,模拟仿真的衍射分布斯特雷尔比为0.16,最大旁瓣强度比为0.1,分辨参量为0.76,分辨率提高倍数为1.3;随着振幅透过率幂次数的增加,主瓣宽度依次减小;同时也伴随着主瓣强度降低和旁瓣强度增大的缺点。这一研究对于远场光学显微镜实现超分辨成像是有帮助的。
In order to improve the resolution of diffraction far field microscopy, a theoretical analysis and numerical simulation are carried out using a pupil filter whose amplitude transmittance varies with the power distribution of radius. The formula of the Fraunhofer diffraction distribution is deduced by adding the amplitude-type pupil filter with exponential function in the optical path and using the scalar diffraction theory. The diffraction pattern is given by MATLAB software to compare the main lobe width of the diffraction distribution. The results show that when the power of 3, the simulation results show that the diffraction distribution Strain ratio is 0.16, the maximum sidelobe intensity ratio is 0.1, the resolution parameter is 0.76 and the resolution is 1.3; The increase of the number of the main lobe leads to the decrease of the main lobe width, and the decrease of the main lobe strength and the increase of the side lobe strength. This study is useful for far-field optical microscopy for super-resolution imaging.