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用射频溅射工艺制备了ｎｍＡｌ粒子的多层复合膜，通过控制Ａｌ粒子和ＡＩＮ膜的生长时间，成功地控制了Ａ１粒子的粒径和在复合膜中的纵向分布。用ＴＥＭ暗场法并结合ＴＶ图像分析测得了ＡＩ粒子的粒径，并导出了粒径和生长时间的经验公式。ｎｍＡｌ粒子多层复合膜的电磁波散射特性与Ａｌ粒子的粒径、填充因子、凝聚程度及纵向分布有关。
A multilayer composite film of nmAl particles was prepared by radio frequency sputtering. By controlling the growth time of Al particles and AIN films, the particle size of A1 particles and the longitudinal distribution in the composite films were successfully controlled. The particle size of AI particles was measured by TEM dark field combined with TV image analysis, and the empirical formula of particle size and growth time was derived. The electromagnetic scattering characteristics of nmAl multilayered composite films are related to the particle size, filling factor, agglomeration and longitudinal distribution of Al particles.