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近几年,半导体气体传感器件,在国外有很大的进展,出现了许多高选择、高稳定的器件。下面仅就几种有实用价值的新型半导体气体传感器件简介如下。一、测定CO气体的传感器件日前,在工业上测定CO气体,使用最广泛的方法是红外吸收法。但是这种方法,主要适用于高浓度的CO气体的测定,对大气污染等第二次污染气体的测定,灵敏度尚感不足。因此,国外开展了对CO气体传感器件的研究工作,并试制了较好的器件。 1.CO气体传感器件的制造方法作为催化活性物质的过渡族金属氧化物,其中ZrO_2、ThO_2等具有吸水作用,这已是众
In recent years, semiconductor gas sensor devices, great progress in foreign countries, there have been many high-choice, high-stability devices. Here are just a few of practical value of the new semiconductor gas sensor device is as follows. First, the determination of CO gas sensor devices Recently, the determination of CO gas in the industry, the most widely used method is the infrared absorption method. However, this method is mainly applied to the determination of high-concentration CO gas, and the sensitivity is still not sufficient for the determination of the second-time polluting gas such as air pollution. Therefore, the foreign CO gas sensing devices carried out research work, and trial-produced a better device. 1.CO gas sensor device manufacturing method As a catalytically active transition group metal oxide, which ZrO_2, ThO_2 and so has a water absorption, which is the public