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SIMS investigation on the 3C-SiC on Si
【机 构】
：
QueenslandMicrotechnologyFacilityandGriffithSchoolofEngineering,AustralianNuclearScienceandTechnolog
【出 处】
：
材料科学与工程：中英文版
【发表日期】
：
2009年8期
【基金项目】
：
Acknowledgment： This work was supported by an Australian Institute of Nuclear Science and Engineering （AINSE） and by Qs Semiconductors.
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