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提出了一种新型基于法布里 -珀罗 (F- P)微腔的发光器件结构 .它采用 PECVD方法制备的非晶硅 /二氧化硅结构作为微腔中的布拉格反射腔 ,非晶碳化硅薄膜作为中间光发射层 ,通过对一维方向光子的限制 ,使发光层荧光强度增强 ,谱线变窄 .通过调节发光层和反射腔膜厚及折射率 ,可以精确控制发光峰位 .实验结果证明该结构可望实现全硅基材料的强室温可见光发射 .
A novel structure of Fabry-Perot (F-P) microcavity-based light-emitting device is proposed, which adopts the amorphous silicon / silicon dioxide structure prepared by PECVD as the Bragg reflector in microcavity, The silicon thin film acts as an intermediate light emitting layer and the fluorescence intensity of the light emitting layer is enhanced and the spectral line is narrowed by limiting the photons in the one-dimensional direction. The emission peak can be accurately controlled by adjusting the thickness and refractive index of the light emitting layer and the reflecting cavity. The results show that the structure is expected to achieve strong room temperature visible light emission of all-silicon-based materials.