概述采用光栅测量技术进行精密机械位移,在国内外已获了广泛的应用,但是由于超精度的激光干涉仪和莫尔条纹细分技术的迅速发展,使两者在高精度测量法上达到了互相媲美的程度。在某种程度上激光干涉仪要比莫尔光栅条纹精度要高,这样往往给制造者和用户耽忧如何获得高精度的精密机械位移信息当量,否则会对整台仪器安装提出过高的环境抗振条件。判向仪逻辑电路采用脉冲调制输入,调制后的信号经传送、编码、延迟、移位、辨别和顺逆 Overview The use of grating measurement technology for precision mechanical displacement, has been widely used at home and abroad, but due to the rapid development of ultra-precision laser interferometer and Moiré fringe subdivision technology, so that the two reached in the high-precision measurement Comparable to each other’s extent. To some extent, the laser interferometer is more accurate than the moiré grating stripe, which often gives manufacturers and users worry about how to obtain high-precision precision machinery displacement information equivalent, otherwise it will put an excessive environment on the entire instrument installation Anti-vibration conditions. Logic analyzer circuit using pulse modulation input, the modulated signal transmitted, encoding, delay, shift, to identify and Shun inverse