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采用飞秒激光对Zr基金属玻璃在空气中进行了表面烧蚀、微打孔与微细切割等过程的研究.通过扫描电镜(SEM)、能量弥散X射线(EDX)能谱分析与透射电镜(TEM)及电子衍射等方法,分析了飞秒激光烧蚀金属玻璃的表面形貌与加工区域发生的相关效应.实验与分析表明加工区域周围无熔融和液滴溅射现象,热影响区极小,并且无晶化现象发生,但飞秒激光微细加工金属玻璃时存在极薄的表面氧化现象.研究结果表明,在适当选择参数的条件下,飞秒激光烧蚀是一种极有前途的金属玻璃无晶化微细加工方法.
The process of surface ablation, micro-perforation and micro-cutting of Zr-based metallic glass in air were studied by using femtosecond laser.The energy dispersive X-ray spectroscopy (EDX) and transmission electron microscopy TEM) and electron diffraction (EDS), the effects of surface morphology and processing area of femtosecond laser ablated metallic glass are analyzed.The experiment and analysis show that there is no melting and droplet sputtering around the processing area, and the heat affected zone is extremely small , And the phenomenon of non-crystallization occurs, but there is an extremely thin surface oxidation phenomenon in femtosecond laser microfabrication of metal glass.The results show that femtosecond laser ablation is a promising metal under the appropriate choice of parameters Glassless crystallization fine processing method.