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利用压电石英晶体设计并制作了一种谐振器型声表面波加速度传感器,并对其性能进行了测试和分析,特别是针对谐振式传感器的特点进行了动态性能的研究。有针对性地设计了频压转换电路,组建了动态测试系统,对该系统的适用性进行了分析和实验测试,结果表明该系统适合于待测试加速度传感器的动态性能测试,利用该系统对传感器的动态性能进行了实际测试。测试结果和进一步的理论分析表明,声表面波加速度传感器具有很高的灵敏度,其动态响应主要决定于机械结构,而与敏感机理关系不大。
A kind of resonator SAW acceleration sensor was designed and fabricated by using piezoelectric quartz crystal. Its performance was tested and analyzed. Especially, the dynamic performance of the resonant sensor was studied. The frequency conversion circuit is designed and the dynamic test system is set up. The applicability of the system is analyzed and experimentally tested. The results show that the system is suitable for the dynamic performance test of the acceleration sensor to be tested. By using this system, The dynamic performance of the actual test. The test results and further theoretical analysis show that the SAW acceleration sensor has a high sensitivity and its dynamic response mainly depends on the mechanical structure, but has little to do with the sensitive mechanism.