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使用非平衡磁控溅射方法沉积了类金刚石（ＤＬＣ）和一定含氟浓度的氟化ＤＬＣ。使用划痕方法试验了不同ＤＬＣ薄膜的抗刻划性能并对其试验机理进行了研究。结果表明划痕试验过程中随着试验载荷的增加，ＤＬＣ破坏形式可分为开裂、崩片、划入剥落及表层的脱落等阶段。其中抗开裂、崩片及划入性能取决于ＤＬＣ本身的力学特性。膜层的脱落载荷取决于膜层与基体的结合强度。降低薄膜的摩擦系数有利于提高ＤＬＣ薄膜的刻划抗力。氟元素的加入可以降低ＤＬＣ层的刻划摩擦力，提高其开裂强度并增加ＤＬＣ薄膜与基体材料的结合强度，从而提高ＤＬＣ的抗刻划性能
Diamond-like carbon (DLC) and fluorinated DLC with a certain fluorine concentration were deposited using unbalanced magnetron sputtering. The anti-scoring performance of different DLC films was tested by scratch method and the experimental mechanism was studied. The results show that with the increase of test load during the scratch test, the failure modes of DLC can be divided into stages of cracking, disintegration, flaking and surface shedding. Among them, the resistance to cracking, disintegration and inclusion properties depend on the mechanical properties of DLC itself. The peeling off of the film depends on the bonding strength of the film to the substrate. Reduce the friction coefficient of the film is conducive to improve the scratch resistance DLC film. Fluorine addition can reduce the scratching friction of DLC layer, improve its cracking strength and increase the bonding strength of DLC film and matrix material, so as to improve the anti-scoring performance of DLC